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Patent US6219219 - Cathode assembly containing an electrostatic chuck

Patent US2445459 - Control circuits for electromagnetic chucks - Google

Machines Used | Walker 6" x 12" Fine Pole Electromagnetic Chuck with

ELECTROSTATIC CHUCK - Patent application

Patent US6409181 - Combination type electric drill chuck structure

Chucks 101 | Kitagawa

ELECTROSTATIC CHUCK DEVICE - Patent application